Skip navigation

ENGN4507 Microelectronic and Photonic Technology

Later Year Course

Offered By Dept Engineering
Academic Career Undergraduate
Course Subject Engineering
Offered in ENGN4507 will not be offered in 2009
Unit Value 6 units
Course Description

This is a strongly laboratory-oriented course that provides hands-on experience with the most common technologies used to fabricate electron devices: photolithography, epitaxy, oxidation, diffusion, ion implantation, thin film deposition, plasma deposition and laser technologies. Researchers from the Research School of Physical Sciences and Engineering participate in the course, offering invited lectures and laboratory experiments in their particular field of expertise. Training in clean room operation and semiconductor processing equipment is provided. The physical grounds and mathematical models for the technologies mentioned above are used in a semiconductor device design exercise. The device is fabricated in the laboratory and its electrical performance is evaluated.

Indicative Assessment

Quiz (15%); Laboratories (20%); Class Presentations (15%); Final Exam (50%)

Areas of Interest Engineering
Requisite Statement

ENGN2224

Other Information

Offered Semester 1, in even years.

Science Group C

The information published on the Study at ANU 2009 website applies to the 2009 academic year only. All information provided on this website replaces the information contained in the Study at ANU 2008 website.

Updated:   13 Nov 2015 / Responsible Officer:   The Registrar / Page Contact:   Student Business Solutions