This course introduces semiconductor physics, devices and technology. Physics topics comprise basic semiconductor physics, diodes, solar cells and transistors. Technology topics comprise oxidisation, diffusion, ion implantation, photolithography, film deposition, electrical interconnection, characterisation, packaging and process integration.

By the end of this course, you should be able to:

1. Understand basic semiconductor physics
2. Understand how diodes, solar cells and transistors work
3. Understand basic semiconductor technology
4. Be able to relate technology to the physics of semiconductor devices
5. Have understanding of the context and use of semiconductor devices

Laboratories (6%); Seminar (12%); Quiz (20%); Tutes (8%); Final Exam (54%)

ENGN2211 or ENGN2218

The textbook is a choice of Introduction to Microelectronic Fabrication by Richard C. Jaeger, Vol V, Modular Series on Solid State Devices (Neudeck & Pierret eds), 2nd Edition, 2002 or S.M. Sze, Semiconductor Devices: Physics and Technology 3e, Wiley, 2006.

If you intend to undertake future semiconductor courses then the latter text is recommended.

Each student is expected to acquire the reading brick from the Office. Extensive notes on semiconductor physics & devices are provided in the reading brick. The library has many books covering semiconductor physics and technology.

Course page http://eng.anu.edu.au/study/currentstudents/courses